Robotic arm
The silicon mechanical arm is formed by isostatic pressing process and sintered at high temperature. According to the requirements of the user's design drawings, the outline size, thickness size and shape can be refined to meet the specific requirements of users.
- Typical application
- Features and advantages
- Specification
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Typical application
It is used for the transmission of wafers in various semiconductor processes.
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Features and advantages
Precise dimensions and thermal stability.
High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation.
It has a smooth surface and good wear resistance, thus safely handling the chip without particle contamination.
Silicon carbide has a resistivity of 106-108Ω and is non-magnetic, meeting the requirements of anti-ESD specifications. It can prevent the accumulation of static electricity on the surface of the chip.
Good thermal conductivity, low expansion coefficient.
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Specification
