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- Typical application
- Features and advantages
- Specification
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Typical application
It is widely used in semiconductor CVD, vacuum sputtering and so on.
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Features and advantages
High temperature resistance - normal use at 1800℃.
High thermal conductivity - comparable to the thermal conductivity of graphite materials.
High hardness - hardness second only to diamond, cubic boron nitride.
Corrosion resistance - strong acid and alkali do not have any corrosion, corrosion resistance is better than tungsten carbide and alumina.
Light weight - density 3.10g/cm3, close to aluminum.
No deformation - very small coefficient of thermal expansion.
Thermal shock resistance - the material can withstand rapid temperature changes, thermal shock resistance, cold and heat resistance, stable performance. -
Specification
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